TESCAN Vega3 SBH SEM (Scanning electron microscope)

SEM with BSE (annular, YAG crystal, 0.1 atomic resolution), SE (Everhart-thornley type, YAG crystal), current (pA meter) and EDS (Bruker Xflash 410 M) detectors.

Electromagnetic optics:

  1. Electron source: W filament (cartridge)
  2. High voltage range: 200 V - 30 kV
  3. Magnification: 4.5 - 1.000.000X
  4. Resolution: 3 nm @ 30 kV, 8 nm @ 3 kV
  5. Vue field: 7.7 mm @ 10 mm WD, 24 mm @ 30 mm WD
  6. Current: 1 pA - 2 μA

Working modes: Resolution, Depth, Field, Wide Field, Electron Channeling


  1. Working pressure: < 9x10-3 Pa (only high vacuum mode available)
  2. Evacuation time: < 3 min


  1. Sample mount: “euccentric” type; holder accepts 4 standard aluminium stubs
  2. Axis: X = 45mm – motorised, Y = 45mm - motorised, Z = 27mm manual, Z’ = 6mm manual
  3. Rotation: 360º
  4. Tilt: +90o e -90o
  5. Maximum sample height: 36mm

Note: this instrument works only in high vacuum mode; non-conduttive samples should be coated with a thin metallic layer before examining to avoid build-up of charge. A sputter/coater is available at the site to perform such coating.

Acquired November 2013 and managed by José António Paixão

Location: TAIL-UC Trace Analysis and Imaging Laboratory (F.16)

How can you have access to it?

This instrument is available to the UC scientific community, external scientific community and industrial users under the general UC policy for access to the UC analytical platforms. Please contact the instrument responsible or TAIL-UC director for details of instrument availability and usage charge rates.


Standard Operating Procedure


Scanning Electron Microscopy Training

Typical Data

Image #1 of FeSe sample

Image #2 of FeSe sample