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Sensitivity of a Rotating Beam Sensor for Stress Evaluation in Aluminium Thin Films
Authors: J.M.M. dos Santos, J.C.P. Pina, A.C. Batista, A.B. Horsfall, K. Wang, N.G. Wright, S.M. Soare, S.J. Bull, A.G. ONeill, J.G. Terry, A.J. Walton, A.M. Gundlach, J.T.M. Stevenson
Ref.: Materials Science Forum 490-491, 649-654 (2005)